Abbreviation: J Vac Sci Technol B Microelectron Nanometer Struct Process Meas Phenom

ISSN: 1071-1023 (Print) 0734-2101 (Linking)

Impact Factor

Year Impact Factor (IF)
2016/2017 1.573
2015 1.398
2014 1.464
2013 1.358
2012 1.267
2011 1.341
2010 1.268
Other titles:
Microelectronics and nanometer structures
Journal of vacuum science and technology. B, Microelectronics and nanometer structures
JVST B1994-
Start year:
1991
Frequency:
Bimonthly
Country:
United States
Language:
English
Publisher:
New York : Published for the Society by the American Institute of Physics, c1991-