Abbreviation: J Vac Sci Technol B Nanotechnol Microelectron

ISSN: 2166-2746 (Print) 2166-2754 (Electronic) 2166-2746 (Linking)

Impact Factor

No impact factor infomation for this journal.
Other titles:
Nanotechnology & microelectronics
JVST B, Nanotechnology & microelectronics
Nanotechnology and microelectronics
Journal of vacuum science and technology. B, International journal devoted to microelectronics and nanometer structures : processing, measurement, & phenomena
Start year:
2010
Frequency:
Bimonthly
Country:
United States
Language:
English
Publisher:
New York, NY : AVS through the American Institute of Physics, c2010-
Website:
http://scitation.aip.org/jvst